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Integrating Nonelectronic Components into Electronic Microsystems
DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/MM.2003.1209465May/June 2003 (vol. 23 no. 3) pp. 36-44
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Bruno Murari, STMicroelectronics

Microelectromechanical systems will soon usher in a new technological renaissance. Just as ICs brought the pocket calculator, PC, and video games, MEMS will provide a new set of products and markets. Learn about the state of the art, from inertial sensors to microfluidic devices.

Citation:
Bruno Murari, "Integrating Nonelectronic Components into Electronic Microsystems," IEEE Micro, vol. 23, no. 3, pp. 36-44, May/June 2003, doi:10.1109/MM.2003.1209465
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