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Finite Element Simulation and Theoretical Analysis of Microelectromechanical System Relays
Banff, Alberta, Canada July 20-July 23
DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/ICMENS.2003.12220122003 International Conference on MEMS ...
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Desheng Li, Yufeng Zhang, "Finite Element Simulation and Theoretical Analysis of Microelectromechanical System Relays," MEMS, NANO, and Smart Systems, International Conference on, pp. 292, 2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03), 2003.
 
 
BibTex
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@article{ 10.1109/ICMENS.2003.1222012,
author = {Desheng Li and Yufeng Zhang},
title = {Finite Element Simulation and Theoretical Analysis of Microelectromechanical System Relays},
journal ={MEMS, NANO, and Smart Systems, International Conference on},
volume = {0},
year = {2003},
isbn = {0-7695-1947-4},
pages = {292},
doi = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2003.1222012},
publisher = {IEEE Computer Society},
address = {Los Alamitos, CA, USA},
}
 
 
RefWorks Procite/RefMan/Endnote
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TY - CONF
JO - MEMS, NANO, and Smart Systems, International Conference on
TI - Finite Element Simulation and Theoretical Analysis of Microelectromechanical System Relays
SN - 0-7695-1947-4
SP
EP
A1 - Desheng Li,
A1 - Yufeng Zhang,
PY - 2003
KW - MEMS microrelay
KW - Finite element simulation
KW - Theoretical analysis
KW - Mechanical characteristic
VL - 0
JA - MEMS, NANO, and Smart Systems, International Conference on
ER -
 
Desheng Li, Beijing University of Technology
Yufeng Zhang, Harbin Institute of Technology
This paper studies the static and dynamic behaviors of a novel microrelay applied in microelectromechanical systems (MEMS) by electromagnetic attraction. The device is composed of a square planar coil, a movable magnetic film with two-supporting cantilever beams and a pair of contacts. The electromagnetic force yielded by the exciting electromagnetic coil actuates the microrelay, and the main advantage is its capability of providing higher forces over relatively large distance. Static and dynamic finite element (FE) simulations are implemented to obtain the mechanical characteristics of the microrelay, the natural frequencies and mode shapes under different levels of electromagnetic attraction. Theoretical studies on the dynamic model are developed to validate the FE simulation results. Good agreement is found between the FE simulation and the theoretical analysis.
Index Terms:
MEMS microrelay, Finite element simulation, Theoretical analysis, Mechanical characteristic
Citation:
Desheng Li, Yufeng Zhang, "Finite Element Simulation and Theoretical Analysis of Microelectromechanical System Relays," icmens, pp.292, 2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03), 2003
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