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Design & Fabrication of Piezoresistive Six Degree of Freedom Accelerometer for Biomechanical Applications
Banff, Alberta, Canada August 25-August 27
DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/ICMENS.2004.482004 International Conference on MEMS ...
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Ranjith Amarasinghe, Dzung Viet Dao, Toshiyuki Toriyama, Susumu Sugiyama, "Design & Fabrication of Piezoresistive Six Degree of Freedom Accelerometer for Biomechanical Applications," MEMS, NANO, and Smart Systems, International Conference on, pp. 148-154, 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04), 2004.
 
 
BibTex
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@article{ 10.1109/ICMENS.2004.48,
author = {Ranjith Amarasinghe and Dzung Viet Dao and Toshiyuki Toriyama and Susumu Sugiyama},
title = {Design & Fabrication of Piezoresistive Six Degree of Freedom Accelerometer for Biomechanical Applications},
journal ={MEMS, NANO, and Smart Systems, International Conference on},
volume = {0},
year = {2004},
isbn = {0-7695-2189-4},
pages = {148-154},
doi = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2004.48},
publisher = {IEEE Computer Society},
address = {Los Alamitos, CA, USA},
}
 
 
RefWorks Procite/RefMan/Endnote
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TY - CONF
JO - MEMS, NANO, and Smart Systems, International Conference on
TI - Design & Fabrication of Piezoresistive Six Degree of Freedom Accelerometer for Biomechanical Applications
SN - 0-7695-2189-4
SP148
EP154
A1 - Ranjith Amarasinghe,
A1 - Dzung Viet Dao,
A1 - Toshiyuki Toriyama,
A1 - Susumu Sugiyama,
PY - 2004
KW - null
VL - 0
JA - MEMS, NANO, and Smart Systems, International Conference on
ER -
 
Ranjith Amarasinghe, Ritsumeikan University
Dzung Viet Dao, Ritsumeikan University
Toshiyuki Toriyama, Ritsumeikan University
Susumu Sugiyama, Ritsumeikan University
A miniaturized piezoresistive six-degree of freedom (6DOF) accelerometer has been developed and fabricated using bulk micromachining technology. Most accelerometers developed so far, sense accelerations in only three axial directions. This accelerometer measures three components of linear acceleration and three components of angular acceleration on three orthogonal axes in the frequency bandwidth of 300Hz. The average measured sensitivities of the fabricated sensor for linear accelerations and angular accelerations show a cross-axis sensitivity of <2%. Comparison of the obtained experimental results and finite element simulation shows good agreement. The sensor is ideal for use in biomechanical research applications such as the study of human gesture recognition systems.
Citation:
Ranjith Amarasinghe, Dzung Viet Dao, Toshiyuki Toriyama, Susumu Sugiyama, "Design & Fabrication of Piezoresistive Six Degree of Freedom Accelerometer for Biomechanical Applications," icmens, pp.148-154, 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04), 2004
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