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Realization and SEM Observation of Polysilicon and Aluminium Cantilever Using Surface Micromachining Technology
Arlington, Virginia July 19-July 21
DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/MSE.1999.787021IEEE International Conference on Micr ...
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S. Lucas, N. Outaleb, O. Bonnaud, J. Pinel, "Realization and SEM Observation of Polysilicon and Aluminium Cantilever Using Surface Micromachining Technology," Microelectronics Systems Education, IEEE International Conference on/Multimedia Software Engineering, International Symposium on, pp. 28, IEEE International Conference on Microelectronic Systems Education, 1999.
 
 
BibTex
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@article{ 10.1109/MSE.1999.787021,
author = {S. Lucas and N. Outaleb and O. Bonnaud and J. Pinel},
title = {Realization and SEM Observation of Polysilicon and Aluminium Cantilever Using Surface Micromachining Technology},
journal ={Microelectronics Systems Education, IEEE International Conference on/Multimedia Software Engineering, International Symposium on},
volume = {0},
year = {1999},
issn = {1530-2024},
pages = {28},
doi = {http://doi.ieeecomputersociety.org/10.1109/MSE.1999.787021},
publisher = {IEEE Computer Society},
address = {Los Alamitos, CA, USA},
}
 
 
RefWorks Procite/RefMan/Endnote
x 
 
TY - CONF
JO - Microelectronics Systems Education, IEEE International Conference on/Multimedia Software Engineering, International Symposium on
TI - Realization and SEM Observation of Polysilicon and Aluminium Cantilever Using Surface Micromachining Technology
SN - 1530-2024
SP
EP
A1 - S. Lucas,
A1 - N. Outaleb,
A1 - O. Bonnaud,
A1 - J. Pinel,
PY - 1999
VL - 0
JA - Microelectronics Systems Education, IEEE International Conference on/Multimedia Software Engineering, International Symposium on
ER -
 
This tutorial concerns graduate students, either in DESS, DEA or engineer formations. The aim of these training is to allow them to apply their knowledge of microelectronics lectures and in the same time to surround difficulty of surface micromachining technology. In this work, students fabricate a polysilicon and an aluminium cantilever beam by using the usual technological process steps in cleanroom. The process is based on the stripping of an underlying sacrificial layer. At the end of the process fabrication a scanning electron microscopy observation is performed.
Citation:
S. Lucas, N. Outaleb, O. Bonnaud, J. Pinel, "Realization and SEM Observation of Polysilicon and Aluminium Cantilever Using Surface Micromachining Technology," mse, pp.28, IEEE International Conference on Microelectronic Systems Education, 1999
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