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A Novel Test Methodology for MEMS Magnetic Micromotors
San Diego, California April 26-April 30
DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/VTEST.1999.7666771999 17TH IEEE VLSI Test Symposium
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Bruce C. Kim, Krishna Marella, "A Novel Test Methodology for MEMS Magnetic Micromotors," VLSI Test Symposium, IEEE, pp. 284, 1999 17TH IEEE VLSI Test Symposium, 1999.
 
 
BibTex
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@article{ 10.1109/VTEST.1999.766677,
author = {Bruce C. Kim and Krishna Marella},
title = {A Novel Test Methodology for MEMS Magnetic Micromotors},
journal ={VLSI Test Symposium, IEEE},
volume = {0},
year = {1999},
issn = {1093-0167},
pages = {284},
doi = {http://doi.ieeecomputersociety.org/10.1109/VTEST.1999.766677},
publisher = {IEEE Computer Society},
address = {Los Alamitos, CA, USA},
}
 
 
RefWorks Procite/RefMan/Endnote
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TY - CONF
JO - VLSI Test Symposium, IEEE
TI - A Novel Test Methodology for MEMS Magnetic Micromotors
SN - 1093-0167
SP
EP
A1 - Bruce C. Kim,
A1 - Krishna Marella,
PY - 1999
VL - 0
JA - VLSI Test Symposium, IEEE
ER -
 
Bruce C. Kim, Michigan State University
Krishna Marella, Michigan State University
This paper describes a novel test methodology for testing MEMS magnetic micromotor. A fault simulation model has been developed for the micromotor. The test apparatus consists of a low frequency sinusoidal source and a resonator that is tuned to the normal operating frequency of the micromotor. The test method described in this paper is used to detect complete open and near-open defects in the stator coils of the micromotor.
Citation:
Bruce C. Kim, Krishna Marella, "A Novel Test Methodology for MEMS Magnetic Micromotors," vts, pp.284, 1999 17TH IEEE VLSI Test Symposium, 1999
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