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Multi-Modal Built-In Self-Test for Symmetric Microsystems
Napa Valley, California April 25-April 29
DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/VTEST.2004.129923722nd IEEE VLSI Test Symposium
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Nilmoni Deb, Carnegie Mellon University, Pittsburgh, PA
R. D. (Shawn) Blanton, Carnegie Mellon University, Pittsburgh, PA
A mathematical model analyzing the efficacy of a built-in self-test technique, applicable to any symmetrical MEMS microstructure, is developed. The model predicts that the BIST technique can also be used to characterize a wide range of local manufacturing variations affecting different regions of the device. Model predictions have been validated by simulation. Specifically, it has been shown that by using a suitable modulation scheme, sensitivity to linear etch variation along a particular direction is improved by nearly 30%.
Citation:
Nilmoni Deb, R. D. (Shawn) Blanton, "Multi-Modal Built-In Self-Test for Symmetric Microsystems," vts, pp.139, 22nd IEEE VLSI Test Symposium, 2004
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