Adaptive Optical Proximity Correction Using an Optimization Method
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| Aizu-Wakamatsu City, Fukushima, Japan October 16-October 19 |
Tsuneo Terasawa, Semiconductor Leading Edge Technologies, Inc. 16-1 Onogawa, Tsukuba, Ibaraki, Japan
Toshihiko Tanaka, Semiconductor Leading Edge Technologies, Inc. 16-1 Onogawa, Tsukuba, Ibaraki, Japan
Osamu Suga, Semiconductor Leading Edge Technologies, Inc. 16-1 Onogawa, Tsukuba, Ibaraki, Japan
This paper proposes a new approach to the optical prox- imity correction (OPC) method which reduces OPC calcu- lation loads by employing an optimization method. OPC is a method of correcting for a mask pattern to improve the fidelity of an image pattern on a silicon wafer. How- ever, conventional OPC calculations have become increas- ingly complex as the size of semiconductor devices becomes even smaller. In order to overcome this problem, we pro- pose an adaptive OPC technology using an optimization method to realize OPC for the full-chip area at fast opera- tional speeds. The effectiveness of this approach in terms of reduced OPC calculation times and highly-accurate correc- tion is demonstrated through computational experiments.
Citation:
Tetsuaki Matsunawa, Hirokazu Nosato, Hidenori Sakanashi, Masahiro Murakawa, Eiichi Takahashi, Tsuneo Terasawa, Toshihiko Tanaka, Osamu Suga, Tetsuya Higuchi, "Adaptive Optical Proximity Correction Using an Optimization Method," cit, pp.853-860, 7th IEEE International Conference on Computer and Information Technology (CIT 2007), 2007
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