Abstract: In this paper we have explored the feasibility of designing an SRAM array in the subthreshold domain of device operation. We have performed a nominal corner analysis of power and stability and a statistical analysis of the different failure probablilities of the subthreshold SRAM. Our analysis shows that subthreshold SRAM gives significant reduction (~100X) of operating amd standby power at iso-performance (~100MHz) compared to the superthreshold counterpart. However, with increasing intra-die variation owing to technology scaling, the failure probability of subthreshold SRAM increases thereby masking the power benefits.