We describe a technique for the accurate measurement of on-chip coupling capacitance using a Charge Based Coupling Capacitance Measurement (CBCCM) Technique. Detailed circuit simulations show that this method can measure subfemtofarad coupling capacitance values, and can be used to isolate and measure components of device capacitance as well.
Citation:
Pratheep A. Nair, Anubhav Gupta, Madhav P. Desai, "An On-Chip Coupling Capacitance Measurement Technique," vlsid, pp.495, The 14th International Conference on VLSI Design (VLSID '01), 2001