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Recent Progress and Remaining Challenges in Pattern Transfer Technologies for Advanced Chip Designs
San Jose, California March 21-March 23
DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/ISQED.2005.101Sixth International Symposium on Qual ...
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Ashok K. Sinha, Applied Materials, Inc
Citation:
Ashok K. Sinha, "Recent Progress and Remaining Challenges in Pattern Transfer Technologies for Advanced Chip Designs," isqed, pp.17-17, Sixth International Symposium on Quality of Electronic Design (ISQED'05), 2005
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