Generic modeling of non-planar dielectrics for 21/2D parasitic extraction is addressed. First, basic non-planar dielectric geometry types are defined. Then it is shown that modeling complex shapes can be simplified based on the overlapping rules for most field solvers. Finally, a novel algorithm based on the overlapping assumption is introduced and the accuracy impact of modeling non-planar dielectrics is shown based on a realistic technology. This approach is already productized and verified against various technologies along with a 2 1/2D extraction tool.